POLARIZED LIGHT APPLYING DEVICE FOR LIGHT ALIGNMENT, PARTICULARLY REGARDING TO EQUALIZING ALIGNMENT DIRECTION OF LIGHT ALIGNMENT FILM BY REDUCING MISALIGNMENT OF POLARIZING SHAFTS ON LIGHT FIELD

摘要

PURPOSE: A polarized light applying device for light alignment is provided to equalize alignment direction of a light alignment film by reducing misalignment of polarizing shafts on a light field by arranging cylindrical lens groups in orthogonal direction. CONSTITUTION: Light emitted from a lamp(1), including ultraviolet rays, is condensed by a condenser(2) and is reflected by a first plane mirror(3) to be parallel light by an input lens(5) so that the parallel light enters a polarizing element(6). The light is separated by the polarizing element so that only P polarized light exits. The P polarized light enters an integrator lens(4) formed of a light incident lens group(41) and a light exit lens group(42). The light incident lens group includes a first cylindrical lens array(41a) arranging a plurality of cylindrical lenses and a second cylindrical lens array(41b) arranging a plurality of cylindrical lenses in direction orthogonal to the arrangement direction of the first cylindrical lens array. The P polarized light exited from the integrator lens is reflected by a second plane mirror(8) through a shutter(7) and becomes parallel light by a collimator lens(9) to be applied to a work(W) mounted on a work stage(WS).