| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a small-sized mass flowmeter having a wide measuring range. <P>SOLUTION: This thermal mass flowmeter includes a planar thin substrate having a sensing face contacting directly or indirectly with a flowing fluid during measurement, and is provided, on the sensing face, with a heating means and a temperature sensor means controlled electrically for finding a temperature difference, by a planar technique. In detail, the substrate having the sensing face exists inside a cavity of a module into which a feed pipe line for the fluid and a drain pipe line come. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
