| 摘要 |
PROBLEM TO BE SOLVED: To improve the position controllability of at least two stages. SOLUTION: The stage ST1 is driven in a two-dimensional surface by a first drive mechanism (LX1, DY1a, DY1b, SY1, SY2), and the stages ST2, ST3 are simultaneously driven with respect to a second axial direction independently from each other with respect to the first axial direction of two-dimensional surface by a second drive mechanism (LX2, DY2a, DY2b) at least partly connected to the first drive mechanism. In this case, the reaction force generated in the first drive mechanism when the stage ST1 is driven affects an influence to the second drive mechanism. The reaction force generated in the second drive mechanism when the stage ST2 is driven can affect the influence to the first drive mechanism. Therefore, a rotary moment operating at the entire system including the respective stages when the stages ST1, ST2 are simultaneously driven to be operated in parallel can be canceled to each other or reduced by driving the stage ST3 in the first axial direction. COPYRIGHT: (C)2005,JPO&NCIPI |
