发明名称 SEMICONDUCTOR PMD LAYER DIELECTRIC
摘要 An embodiment of the invention is a method of manufacturing a semiconductor wafer 2 where a layer of undoped silicon glass 15 is formed over the front-end structure 3. Another embodiment of the present invention is an integrated circuit 2 having a back-end structure 4 in which the dielectric layer 15 contains undoped silicon glass.
申请公布号 US2004238853(A1) 申请公布日期 2004.12.02
申请号 US20030448097 申请日期 2003.05.29
申请人 HONG QI-ZHONG;HUANG PETER 发明人 HONG QI-ZHONG;HUANG PETER
分类号 H01L23/31;H01L23/532;(IPC1-7):H01L29/76 主分类号 H01L23/31
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