| 摘要 |
<P>PROBLEM TO BE SOLVED: To improve the fixing and releasing workability of a conveyor in association with an interval change. <P>SOLUTION: A substrate conveyor includes a movable unit 2B which has a movable frame 50 extending in an X-axis direction and having a pair of parallel conveyors 20B, 21B and movable in a Y-axis. The rear side conveyor 21B of the conveyors 20B, 21B is mounted at a guide shaft 60 rotatably supported to the movable frame 50 via a one-way clutch 63. The movable frame 50 has a locking unit 70a (switching means) capable of switching to the stator (locking state) for inhibiting the relative rotation of the conveyor 21B and the guide shaft 60 or the stator (unlocking state) for allowing the relative rotation of the conveyor 21B and the guide shaft 60 in response to the directional switching of a rotary force to be imparted to the guide shaft 60. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
