| 摘要 |
PROBLEM TO BE SOLVED: To provide a new lifting mechanism of a workpiece capable of reducing a drawback of adhesion of a deposit due to the infiltration of gas between a lifter pin and a pin inserting hole, and to provide a processor provided with the same. SOLUTION: This lifting mechanism of a workpiece has pin inserting holes 50 each penetrating a placing stand 38 for placing a workpiece W to be processed in a processing chamber in a vertical direction, lifter pins 52 inserted into the pin inserting holes so as to be freely lifted, and a driving means for driving the lifter pins so that the pins perform protrusion operation from the pin inserting holes, and the lifting mechanism enables the workpiece to vertically lift by the protrusion operation of the lifter pins. On the placing stage, an extending sleeve 68 constituted to protrude downward coaxially with the insertion holes 50 from its bottom portion 38b is provided, and the lifter pins are inserted in the extending sleeve. COPYRIGHT: (C)2005,JPO&NCIPI |
