APPARATUS FOR TRANSFERRING OBJECT, METHOD OF USING THE SAME, AND LITHOGRAPHY PROJECTOR INCLUDING THE TRANSFER APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a transfer apparatus which can reduce the occurrence of contaminated particles while correctly receiving an object on a receiving base with a relatively high speed. SOLUTION: A transfer apparatus 10 comprises a measuring device 22 for measuring the relative position of a gripper 15 with respect to a receiving base 20 at least in a one-dimensional manner. A position error is determined with respect to a target relative position based on the measured relative position. A relative position error on a second position can be minimized by adjusting the position of the gripper 15 relative to the receiving base 20. COPYRIGHT: (C)2005,JPO&NCIPI