发明名称 METHOD FOR PRODUCING SINGLE CRYSTAL OF MULTI- ELEMENT OXIDE SINGLE CRYSTAL CONTAINING BISMUTH AS CONSTITUTING ELEMENT
摘要 <p>A method for producing a multi-element oxide single crystal containing Bi as a constituting element, such as (Bi2O2)Am-1BmO3m+1 [wherein A represents Sr, Ba, Ca, Bi or the like, and B represents Ti, Ta or Nb], which comprises depositing a flux comprising a composition satisfying, in mole ratio, 0 &lt; CUO/BI2O3 &lt; 2 AND 0 &LE; TIO/BI2O3 &lt; 7/6 on a substrate, and then depositing a single crystal on the substrate via said flux deposition layer, or comprises preparing a melt comprising a composition having the above mole ratios in the sum of a raw material and a flux and cooling the melt to thereby form a single crystal, or comprises depositing a flux comprising CuO on a substrate, and then depositing by the use of Bi6Ti3O12 to Bi8Ti3O12 as a target, which has excess Bi as compared with the objective film, to thereby supply Bi-Ti-O to said flux deposited layer and form a single crystal of Bi4Ti3O12 on the substrate. The method allows the production of the above oxide single crystal which is excellent in crystallinity.</p>
申请公布号 WO2004104276(A1) 申请公布日期 2004.12.02
申请号 WO2004JP07309 申请日期 2004.05.21
申请人 JAPAN SCIENCE AND TECHNOLOGY AGENCY;KOINUMA, HIDEOMI;MATSUMOTO, YUJI;TAKAHASHI, RYOTA 发明人 KOINUMA, HIDEOMI;MATSUMOTO, YUJI;TAKAHASHI, RYOTA
分类号 C30B29/22;C30B9/00;C30B9/12;C30B19/02;H01L21/8246;H01L27/105;(IPC1-7):C30B29/22;C30B29/30;C30B23/08;C30B25/18;C30B29/32;C23C14/08;C23C16/40 主分类号 C30B29/22
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