APPARATUS FOR SPINNING WAFER WITH INTENSIFIED BOLT

摘要

PURPOSE: An apparatus for spinning a wafer is provided to restrain damage of a wafer due to breakage of a bolt by improving tensile intensity and fatigue intensity of the bolt using SUS material. CONSTITUTION: An apparatus includes a spin chuck, a bolt, a connection pin, and a cap. The spin chuck(110) holds and rotates a wafer. The bolt connects the spin chuck with a driving shaft(150). The connection pin(160) is used for transmitting rotatory strength of the driving shaft to the spin chuck. The cap(130) covers the bolt to prevent corrosion due to chemicals. The connection pin and the cap are made of polypropylene or teflon. The bolt is made of SUS material.