PREPARATION METHOD OF PLASTIC FILM FOR DISPLAY PANEL WITH MEMBRANE BLOCKING GAS PENETRATION AND BUFFER LAYER BETWEEN FILM AND MEMBRANE

摘要

PURPOSE: Provided is a plastic film for display panels on which is coated with a membrane having a property of blocking gas penetration and durability. A buffer layer which exists between a plastic film and the membrane, consists of inorganic material containing carbon and is environment-friendly. CONSTITUTION: The method comprises steps of: (a) preparing transparent plastic film; (b) introducing the plastic film into a reaction chamber which generates plasma by applying high frequency power source to electrodes; (c) treating the surface of transparent plastic film by generating plasma after introducing reaction gas and inducing certain power source to electrodes; and (d) forming a membrane blocking gas penetration on the surface of plasma-treated transparent film. The step (d) also comprises the steps of: (d1) forming inorganic buffer layer containing carbon on the surface of transparent plastic film by plasma reaction(PECVD) of complex inorganic compound precursor, with maintaining certain ratio of oxygen partial pressure (oxygen partial pressure/partial pressure of complex organic compound) and (d2) forming an inorganic membrane not containing carbon which blocks gas penetration, on the inorganic buffer layer containing carbon formed by raising oxygen partial pressure.