| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an assembling apparatus which can improve the working efficiency in the production process, enables accurate adhesion and prevents contamination of a pellicle. <P>SOLUTION: The assembling apparatus for a large-size pellicle is equipped with a photographing means to photograph above the mounted pellicle frame, a moving means to move the photographing means, and a display means to display the image photographed by the photographing means. Thereby, a spread state of adhesive on the pellicle frame can be observed without approaching the pellicle. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
