| 摘要 |
PROBLEM TO BE SOLVED: To improve the productivity of a liquid crystal panel by forming an alignment layer or insulating film over the entire internal surface of a substrate without making a choice by processing a liquid crystal panel, having at least one of the alignment layer and an insulating film over the entire internal surface of the substrate with plasma at atmospheric pressure and selectively removing the alignment layer or insulating film at a terminal part. SOLUTION: Mixed gas 15 of He and O<SB>2</SB>is introduced into a line gun 13 and the terminal part 19 of the liquid crystal panel 18 placed on a stage 17 sited in the plasma 16 produced with a high frequency from an RF power source 14 is superposed on the tip of the line gun 13. COPYRIGHT: (C)2005,JPO&NCIPI
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