发明名称 Bonding member and electrostatic chuck
摘要 A bonding member includes, a ceramics member having a concave portion, a metal member which has a convex portion fitted to the concave portion, a first bonding material which joins a bottom portion of the concave portion of the ceramics member and a tip portion of the convex portion of the metal member and has a porous structure including particles and brazing filler metal that covers a corner between tip and side portions of the metal member, and a second bonding material which includes brazing filler metal that joins a side portion of the concave portion of the ceramics member and a side portion of the convex portion of the metal member.
申请公布号 US2004240142(A1) 申请公布日期 2004.12.02
申请号 US20040790259 申请日期 2004.03.01
申请人 NGK INSULATORS, LTD. 发明人 FUJII TOMOYUKI;MORI YUTAKA;HATTORI AKIYOSHI
分类号 H01L21/683;H01L21/68;H02B1/00;(IPC1-7):H02B1/00 主分类号 H01L21/683
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