发明名称 Device test apparatus and test method
摘要 One test board for executing a test is provided for each of a plurality of DUTs (Devices-Under-Test) such as semiconductor integrated circuits, a multi test board controller for managing these test boards is provided, and a plurality of test boards managed by each multi test board controller are operated in parallel to simultaneously perform independent tests on the respective DUTs.
申请公布号 US2004239359(A1) 申请公布日期 2004.12.02
申请号 US20040853237 申请日期 2004.05.26
申请人 SHARP KABUSHIKI KAISHA 发明人 MATSUMOTO KYOZO
分类号 G01R31/28;G01R31/319;H01L21/66;(IPC1-7):G01R31/02 主分类号 G01R31/28
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