| 摘要 |
A method of fabricating carbon nanotubes in a nanotube growth apparatus including executing a nanotube growth process recipe (100) and monitoring a safety condition (112, 114, 116, 120) during the executing step (104). The executing step (102, 104, 106, 108, 110, 122) is interlocked to the monitoring step (112, 114, 116, 120) such that the executing step (104) can be aborted (118) based on the output of the monitoring step. |
