DEVICE FOR AUTOMATICALLY INSPECTING PATTERN OF INTEGRATED CIRCUIT BY IRRADIATING TRANSMISSION LIGHT ON TAB TAPE WITHOUT WRONG DETECTION IN SPITE OF FINE UNEVEN LAYER

摘要

PURPOSE: A pattern inspection device is provided to prevent stain of image and wrong detection from diffused reflection in the uneven part of the adhesive by irradiating the diffusion light outside the visual field of an image pickup device and photographing the pattern of the substrate with the image pickup device. CONSTITUTION: A tape transfer unit(10) sends a pattern(5a) of a TAB(tape automated bonding) tape(5) to an inspection unit(1), and a CCD(charge coupled device) line sensor(1b) photographs the pattern by irradiating the illumination light from a transmission lighting unit(1a). The transmission lighting unit has two lighting units inclined and irradiates the tilted light. Image is supplied to a control unit(4), and compared with the master pattern image to decide the pattern. Image is obtained without stain or blot by irradiating the diffusion light to the TAB tape.