| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a polishing tool pressure distribution measuring method which enables a measurement of a pressure distribution generated between a polishing tool surface and a workpiece in real time by using a photoelastic phenomenon as a means for measuring the pressure distribution with high accuracy, in order to visualize and clarify a polishing process and carry out the polishing with high accuracy and high stability, and to provide a polishing tool and a polishing device. <P>SOLUTION: In implementation of the polishing tool pressure distribution measuring method, a system is employed which comprises a photoelasticity generating optical system for measuring the pressure distribution, based on the polishing device, a heterodyne polarimeter for measuring the photoelasticity with high accuracy, a photoelastic phase modulator for enabling automatic measurement, a control system for controlling a measuring system location, an image signal processing computer for processing fetched signal data, etc. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
