| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a green sheet drilling method that leaves no residues in a through hole to be formed on a green sheet, and also to provide a green sheet placing base. <P>SOLUTION: The base 10 is formed of a material that reflects a laser beam and holes 12a, 12b are formed at a prescribed interval thereon. The hole 12a is annularly formed, with a part 10a of the base 10 left, at a position corresponding to the periphery of a through hole 18 to be drilled in the green sheet W. The hole 12b is formed correspondingly to the parts other than the through holes 18. With the holes 12a, 12b connected to a suction source to energize it, the green sheet W arranged on the base 10 is thereby sucked to the base 10 and fixed. An emitted laser beam, passing through the formed through hole 18, strikes the part 10a of the base 10 and is reflected and the reflected laser beam is made incident again on the through hole 18. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
