| 摘要 |
PROBLEM TO BE SOLVED: To provide an eccentricity measuring device of simple structure and small size, for less loss in light quantity and energy, with reliability in measurement precision. SOLUTION: An eccentricity measuring device 1 comprises a light source 11, a collimating mark 13 that allows the light from the light source 11 to pass, a total reflection mirror 14 that totally reflects the light passing the collimating mark 13 toward an subject lens 30 side and comprises a transmission part 14b, a lighting optical system 10 comprising an objective lens 15 that focuses the light from the total reflection mirror 14 at a near axis focal point of the subject lens 30, and an observing means 20 for observing a reflected image by the inspected lens 30. The objective lens 15 constitutes the lighting optical system 10 and focusing the reflected image from the subject lens 30 near the transmission part 14b of the total reflection mirror 14, for observation. COPYRIGHT: (C)2005,JPO&NCIPI
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