| 摘要 |
PROBLEM TO BE SOLVED: To provide a contour shape inspection method of a component and its device capable of acquiring an accurate silhouette image of a test object component even if another component is arranged on the position near the test object component. SOLUTION: An ultraviolet ray generation source 6 is arranged on a proper position, and a fluorescent screen 7 for emitting visible light by the ultraviolet ray from the ultraviolet ray generation source 6 is arranged on the back of the test object component 2A, and the test object component 2A is irradiated therewith. An image processing device 4 acquires the silhouette image of the test object component 2A by irradiation from the fluorescent screen 7 by a CCD image sensor, and performed measurement processing of the outer diameter of the test object component 2A. COPYRIGHT: (C)2005,JPO&NCIPI
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