| 摘要 |
PROBLEM TO BE SOLVED: To provide a leakage detecting device in which a gas exhaust pipe is branched and the branched gas feed pipe line is connected to a position having a different compression ratio of a main pipe with an evacuation means, enabling switching the gas feed pipe line not to affect a leakage test without providing a vacuum meter for high-vacuum area measuring when connecting the gas feed pipe line to a position having a smaller compression ratio. SOLUTION: Each of on-off valves 7 controls switching of the gas feed pipe line 6 based on a background value of a noble gas measured by an analyzer tube 2. COPYRIGHT: (C)2005,JPO&NCIPI
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