Automated production of functional nanostructures especially sensors for scanning microscopy, using an automatic positioning assembly with a high-energy radiation or particle beam for processing a substrate manipulated with the assembly

摘要

A method for automated production of nanostructures in which a number of automated positioning sequences are carried out on a substrate from which the structures are to be processed using a particle or photon beam, especially an ion or electron beam. The invention also relates to a corresponding device for automated production of functional nanostructures, comprising: a fastening device (2) for fixing a substrate in position; a displaceable table (3) and positioning drive (11); a microscope (4) for producing substrate images or substrate parts; image analysis device for analysis of images to detect the occurrence of defined characteristics and; a source for a particle or radiation beam (7) for processing the substrate.