METHOD OF INSPECTING WORKING STATE OF SEMICONDUCTOR DEVICE MANUFACTURING EQUIPMENT FOR PREVENTING ERRORS DUE TO HANDLING OF WORKER AND SYSTEM FOR PERFORMING THE SAME

摘要

PURPOSE: A method of inspecting a working state of semiconductor device manufacturing equipment and a system for performing the same are provided to prevent errors due to the handling of a worker by checking automatically the working state using a host terminal and a controller. CONSTITUTION: An inspection signal for inspecting a working state of semiconductor device manufacturing equipment is transmitted to the equipment(S100,S200). An inspecting process is performed according to the inspection signal(S300). By comparing the results of the inspecting process with an allowance, the working state of the equipment is determined(S500). The inspection signal is generated from a host terminal and the signal is transmitted to the equipment via an LAN(Local Area Network). When the results of the inspecting process are deviated from the allowance, the equipment is stopped by a controller(S600).