| 摘要 |
<p>PROBLEM TO BE SOLVED: To prevent corrosion of parts in the surroundings of an ICP generation part and the equipment and the enhance the durability by providing a filter means for removing a corrosion component from waste gas of an analyzed sample, etc., generating at the ICP generation part. SOLUTION: An ICP emission spectrochemical analyzer 1 is fixed a duct 8 to a discharge port 7 of an ICP emission part 3, and a forced ventilation fan 9 is provided at the tip side of the duct 8. In the mid-way part of the duct 8, a filter 10 for filtering a corrosion component such as HCl is provided in freely attachbly and detachably, Even through the sample containing the corrosion component such as HCl is analyzed by using the ICP emission spectrochemical analyzer 1, the waste gas containing the corrosion component is forcedly exhausted from the ICP emission part 3 with the forced ventilation fan 9 and the corrosion component if filtered from the waste gas with the filter 10, and the waste gas not containing a corrosion component is exhausted in a glove box. Thus, even through the globe box is composed of stainless steel, the box is not corroded.</p> |
