| 摘要 |
PROBLEM TO BE SOLVED: To provide a probe using contact shoes for realizing highly reliable inspection, and to provide a positioning method with a positioning mechanism of the inspection device using the same. SOLUTION: The probe 10 reducing an electrical loss includes an insulating substrate 11 molded curved, having a plurality of penetration holes 13 or hollows on one end part thereof, the contact shoes 12 arranged in the penetration holes 13 or hollows, electrically contacting with electronic components 30 having connecting terminals. Positioning is performed in accordance with a guide surface 24C slidably formed in the C direction with guide surfaces 24X, 24Y, 24Z slidably formed in the X, Y, Z directions and around the center of the contact shoes 12 as standard points, by the positioning mechanism of the inspection device 20 using the probe 10. COPYRIGHT: (C)2005,JPO&NCIPI
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