| 摘要 |
PROBLEM TO BE SOLVED: To exhaust high temperature gas as it is under high temperature environment without temporal cooling, by solving problems of heat resistance and corrosion resistance in a case of using heavy metals such as lead or bismuth as evaporation material. SOLUTION: A vapor injection pump comprises: a gas introducing chamber 3 introducing the gas from an intake port 4 side; a molten evaporation material vessel 1 storing the evaporation material heated and melted by a heater 6; an evaporation part 2 receiving the molten evaporation material supplied from the molten evaporation material vessel 1, heating the molten evaporation material to become a high temperature, evaporating the material, and injecting vapor of the evaporation material from a nozzle 10; and an exhaust part 12 receiving the gas in the gas introducing chamber 3 with kinetic energy given from the vapor of the evaporation material injected from the nozzle 10. The evaporation part 2 is divided and separated from the molten vapor material vessel 1, and an outer wall 7 thereof is made of ceramic having corrosion resistance against the molten evaporation material. COPYRIGHT: (C)2005,JPO&NCIPI
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