发明名称 Closed loop mover assembly with measurement system
摘要 A mover assembly (16) that moves or positions an object (12) includes a mover output (226), an actuator (230), and a measurement system (20). The mover output (226) is connected to the object (12), and the actuator (230) causes the mover output (226) to rotate about a first axis and move along the first axis. In this embodiment, the measurement system (20) directly measures the movement of the mover output (226) and provides feedback regarding the position of the mover output (226).
申请公布号 US2004239265(A1) 申请公布日期 2004.12.02
申请号 US20030452777 申请日期 2003.05.30
申请人 ZIEGLER ANDREW;ARNONE DAVID F.;GREEN EVAN DRAKE HARRIMAN 发明人 ZIEGLER ANDREW;ARNONE DAVID F.;GREEN EVAN DRAKE HARRIMAN
分类号 H01L41/09;(IPC1-7):H02N1/00 主分类号 H01L41/09
代理机构 代理人
主权项
地址