HIGH VOLTAGE GENERATOR FOR BURN IN TEST, ESPECIALLY INCREASING INTERNAL POWER SUPPLY POTENTIAL IN PROPORTION TO EXTERNAL POWER SUPPLY POTENTIAL

摘要

PURPOSE: A high voltage generator for burn in test is provided to increase reliability while verifying a semiconductor memory device by suppressing the variation of a trigger point according to process and temperature. CONSTITUTION: A reference potential generation unit(110) outputs a reference power supply potential(Vr1). An internal power supply potential generation unit(130) makes an internal power supply potential(Vrc) using the reference potential. A current mirror differential amplifier(150) increases an output potential(Vrc) of the internal power supply potential generation unit during a burn in test mode. An internal power supply potential driving unit(160) increases the internal power supply potential in proportion to an external power supply potential during the burn in test mode. And a pumping unit(110) powers up the reference potential generation unit and the internal power supply potential generation unit and the internal power supply potential driving unit.