FIELD EMISSION TYPE ELECTRON SOURCE

摘要

PROBLEM TO BE SOLVED: To provide an field emission type electronic source in which a large electric current density is made possible at low cost and with a superior mass-productivity.

SOLUTION: This field emission type electron source 100 is formed on a substrate 6, is equipped with an insulating layer 4 having one or more openings 5 and a drawing electrode 3 formed on the insulating layer 4, and in one or more openings 5, a plurality of emitters 2 to emit electrons respectively by means of an electric field from the drawing electrode 3 are formed on the substrate 6.

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