| 摘要 |
PROBLEM TO BE SOLVED: To properly realize both-side fixed electrode constitution by simple constitution, in a capacity type acceleration sensor unit with a sensor chip having a comb-toothed movable electrode and comb-toothed fixed electrodes assembled to a circuit chip. SOLUTION: The sensor chip 100 has the comb-toothed movable electrode 24 displaced along a Y-direction and the comb-toothed fixed electrodes 30, 31, 40, 41 arranged opposed to the movable electrode 24, in one face side of a semiconductor substrate 10, and an acceleration is detected based on a capacity change between the movable electrode and the fixed electrodes accompanied to acceleration impression along the Y-direction. Both-side fixed electrode constitution is formed to be provided opposedly one by one with the fixed electrodes 30, 31, 40, 41, individually in one side of a direction along the Y-direction in the movable electrode 24 and the other side thereof. In the sensor chip 100, one face of the substrate 10 is faced to the circuit chip, and respective electrode pads 25a, 30a, 31a, 40a, 41a are connected electrically to the circuit chip via a bump electrode. COPYRIGHT: (C)2005,JPO&NCIPI |
