| 摘要 |
PROBLEM TO BE SOLVED: To simplify a drive mechanism for a light shielding member while preventing the inclination in the scanning direction of the boundary of a shot region specified at the start and end of an exposure. SOLUTION: A shade 23a light-shielding a part of a mask M is mounted on a mask stage 5 holding the mask M. The shade 23a is supported to movable members 22a and 28a moved in the X direction along driving shafts 21a and 27a. The angle to the axis Y of the shade 23a can be adjusted by moving only one of the movable members 22a and 28a or moving both members in the opposite direction, and the shade 23a can be displaced in parallel along an axis X by moving the movable members 22a and 28a at a uniform velocity. COPYRIGHT: (C)2005,JPO&NCIPI
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