发明名称 P-CHANNEL POWER MIS FIELD EFFECT TRANSISTOR AND SWICHING CIRCUIT
摘要 A P-channel power MIS field effect transistor formed on a silicon surface having substantially a (110) plane, wherein a gate insulation film is used which provides a gate-to-source withstand voltage of at least 10V, and flattens a silicon surface or contains Kr, Ar or Xe.
申请公布号 WO2004105116(A1) 申请公布日期 2004.12.02
申请号 WO2004JP07075 申请日期 2004.05.24
申请人 OHMI, TADAHIRO;YAZAKI CORPORATION;TERAMOTO, AKINOBU;AKAHORI, HIROSHI;NII, KEIICHI;WATANABE, TAKANORI 发明人 OHMI, TADAHIRO;TERAMOTO, AKINOBU;AKAHORI, HIROSHI;NII, KEIICHI;WATANABE, TAKANORI
分类号 H01L21/316;H01L21/28;H01L21/318;H01L29/04;H01L29/51;H01L29/78 主分类号 H01L21/316
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