| 摘要 |
PROBLEM TO BE SOLVED: To easily and accurately position a glass substrate in a predetermined position in a short time period without having a bad influence on the glass substrate. SOLUTION: Air pressures P<SB>1</SB>, P<SB>2</SB>and P<SB>3</SB>are controlled to be larger as being apart from a part near respective reference pins 10b and 10c on a substrate stage 2, and the glass substrate 3 is tilted. The glass substrate 3 is slid and moved toward the respective reference pins 10b and 10c by the own weight of the glass substrate 3, is abutted to the respective reference pins 10b and 10c, and is positioned in the reference position. COPYRIGHT: (C)2005,JPO&NCIPI |
