Gas sensor comprises a solid electrolyte and measuring and reference electrodes made from thin layers arranged on a gas-permeable support

摘要

Gas sensor comprises a solid electrolyte (4) which conducts oxygen ions with a measuring gas side and a reference gas side and separate the a measuring gas chamber from a reference gas chamber; a measuring electrode (5) arranged on the measuring gas side of the electrolyte; a reference electrode (3) arranged on the reference gas side of the electrolyte; and a gas-permeable support (1) in the region of the electrodes. The solid electrolyte and the electrodes are made from thin layers and are arranged on the gas-permeable support. An Independent claim is also included for a process for the production of a gas sensor. Preferred Features: The gas-permeable support is made from ceramic, glass and/or metal. The support has an open porosity and is made from a material having pores with a diameter of 0.1-10 mu m. The material of the support is made from gas-tight material having openings (2) in the region of the electrodes. The openings are produced using a laser. The support material is aluminum oxide. The solid electrolyte is made from doped ZrO2 or CeO2.