| 摘要 |
PROBLEM TO BE SOLVED: To manufacture a probe unit for forming a probe having improved electrical connectivity with an electrode by a simple process. SOLUTION: A method for manufacturing the probe unit 1 having a plurality of probes 20 and a support section 30 for supporting the plurality of probes 20 includes a patterning process for forming a resist 12 having a plurality of openings 14 on the surface of a substrate 10 made of metal, and a plating process for forming the probes 20 on the surface of the substrate 10 including a rough face region exposed from each opening 14 by plating. The resist 12 for forming the probes 20 is formed on the surface of the substrate 10 having a rough face region formed by irregularities that are finer than the pitch of the probes 20, and the substrate 10 is removed after forming the probes 20 at the opening 14 of the resist 12. Then, irregularities at the rough face region of the substrate 10 are transferred to the surface of the probes 20, and a plurality of projections having a finer pitch than that of the the probes 20 can be formed at each of the probes 20. COPYRIGHT: (C)2005,JPO&NCIPI
|
