发明名称 Substrate processing apparatus and thermal type flowmeter suitable to the same
摘要 In a thermal type flowmeter 60, a heating/heat-sensitive coil 64 which is shaped as a coil is fit close into an approximately central portion of a duct pipe 63. A flow rate computing circuit 65 supplies electric power to the heating/heat-sensitive coil 64 in accordance with an instruction received from a control portion, the heating/heat-sensitive coil 64 develops heat, and the heat developing at the heating/heat-sensitive coil 64 heats up a hole transporting material 8 which flows through the duct pipe 63. Further, the flow rate computing circuit 65 which is electrically connected with the heating/heat-sensitive coil 64 detects a difference between an upstream-side temperature and a downstream-side temperature, and calculates the flow rate (mass flow rate) of the hole transporting material 8 based on this temperature difference, the amount of heating, physical properties data such as the specific heat and the heat capacity regarding the hole transporting material 8.
申请公布号 US2004237642(A1) 申请公布日期 2004.12.02
申请号 US20040844753 申请日期 2004.05.12
申请人 DAINIPPON SCREEN MFG. CO., LTD. 发明人 MASUICHI MIKIO;TAKAMURA YUKIHIRO;MORIWAKI SANZO;ADACHI HIDEKI
分类号 B05C11/00;B05C11/10;G01F1/684;H01L51/50;H05B33/10;(IPC1-7):G01F1/68 主分类号 B05C11/00
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