发明名称 |
Aluminum oxide produced by flame hydrolysis and doped with divalent metal oxides and aqueous dispersions hereof |
摘要 |
Aluminium oxide doped with a divalent metal oxide, produced by flame hydrolysis and which has no spinell structures or alpha-aluminium detectable in an x-ray diffractogram. It is produced by a pyrogenic process in which, during the flame hydrolysis of aluminium halogenides, an aerosol, which contains an aqueous solution of a divalent metal salt is added to the gas mixture. The doped aluminium oxides can be used in aqueous dispersions for chemical-mechanical polishing.
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申请公布号 |
US2004240062(A1) |
申请公布日期 |
2004.12.02 |
申请号 |
US20040486793 |
申请日期 |
2004.02.13 |
申请人 |
LORTZ WOLFGANG;HEMME INA;BATZ-SOHN CHRISTOPH;MORTENS MARTIN;HABERMANN HERBERT;DIENER UWE |
发明人 |
LORTZ WOLFGANG;HEMME INA;BATZ-SOHN CHRISTOPH;MORTENS MARTIN;HABERMANN HERBERT;DIENER UWE |
分类号 |
C01F7/02;C01F7/30;C03C19/00;C09C1/04;C09D17/00;C09G1/02;C09K3/14;H01L21/02;H01L21/304;H01L21/306;H01L21/321;(IPC1-7):G02B5/18;G02B27/44 |
主分类号 |
C01F7/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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