发明名称 Aluminum oxide produced by flame hydrolysis and doped with divalent metal oxides and aqueous dispersions hereof
摘要 Aluminium oxide doped with a divalent metal oxide, produced by flame hydrolysis and which has no spinell structures or alpha-aluminium detectable in an x-ray diffractogram. It is produced by a pyrogenic process in which, during the flame hydrolysis of aluminium halogenides, an aerosol, which contains an aqueous solution of a divalent metal salt is added to the gas mixture. The doped aluminium oxides can be used in aqueous dispersions for chemical-mechanical polishing.
申请公布号 US2004240062(A1) 申请公布日期 2004.12.02
申请号 US20040486793 申请日期 2004.02.13
申请人 LORTZ WOLFGANG;HEMME INA;BATZ-SOHN CHRISTOPH;MORTENS MARTIN;HABERMANN HERBERT;DIENER UWE 发明人 LORTZ WOLFGANG;HEMME INA;BATZ-SOHN CHRISTOPH;MORTENS MARTIN;HABERMANN HERBERT;DIENER UWE
分类号 C01F7/02;C01F7/30;C03C19/00;C09C1/04;C09D17/00;C09G1/02;C09K3/14;H01L21/02;H01L21/304;H01L21/306;H01L21/321;(IPC1-7):G02B5/18;G02B27/44 主分类号 C01F7/02
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