SEMICONDUCTOR DEVICE MANUFACTURING EQUIPMENT WITH GUIDE FOR COVER

摘要

PURPOSE: A bit of equipment for manufacturing a semiconductor device is provided to move stably a cover up and down by using a guide. CONSTITUTION: A bit of equipment for manufacturing a semiconductor includes a chamber, a driving part, and a guide. The chamber includes a housing(30) and a cover(60) for switching an upper portion of the housing. The driving part(40) is used for moving the cover up and down. The guide(80) is installed outside the chamber to guide the cover. A protrusion(70) with a through hole is formed at a side of the cover. The guide is formed like a rod. The guide is inserted in the through hole of the protrusion.