METHOD OF MEASURING OVERLAY FOR IMPROVING EFFICIENCY

摘要

PURPOSE: A method of measuring overlay is provided to improve the efficiency by checking the error of a measurement recipe before performing an overlay measuring process. CONSTITUTION: A criterion recipe is provided to an overlay measuring system corresponding to process data of the overlay measuring system(S21). Whether overlay mark information of the criterion recipe corresponds to an overlay measuring range of a measurement recipe or not is checked(S26). When the overlay mark information corresponds to the overlay measuring range, an overlay measuring process is performed by using the measurement recipe(S29). When the overlay mark information and the overlay measuring range are mismatched, the overlay measuring process is performed after correcting the measurement recipe.