Sputtering device with a cathode comprising a permanent magnet assembly

摘要

The atomization device has a magnetic amplification provided by a permanent magnet device on the opposite side of the target (3) to the vaporization surface, providing magnetic field lines extending above and through the vaporization surface. The permanent magnet device has two coaxial closed rings of individual magnets (5,5',5'',...6,6') coupled together via a magnetic yoke (15), with a ferromagnetic insert (14) between the yoke and the adjacent surface of the target.