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发明名称
FLUORINATED COPOLYMERS FOR MICROLITHOGRAPHY
摘要
申请公布号
EP1481285(A1)
申请公布日期
2004.12.01
申请号
EP20030711249
申请日期
2003.02.26
申请人
E.I. DU PONT DE NEMOURS AND COMPANY
发明人
FEIRING, ANDREW, EDWARD;SCHADT, FRANK, L., III;TAYLOR, GARY, NEWTON
分类号
C08F12/20;C08F216/14;C08F220/10;C08F232/00;G03F7/004;G03F7/039;H01L21/027;(IPC1-7):G03F7/004;C08F214/18
主分类号
C08F12/20
代理机构
代理人
主权项
地址
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