SCANNING PROBE MICROSCOPE AND SPECIMEN SURFACE STRUCTURE MEASURING METHOD

摘要

The position of probe (21) is detected when a predetermined atomic force is measured in the attractive force region. The probe is moved to a measurement point along the specimen surface. The frequency of vibration in the measurement point along the specimen surface is measured. The atomic force of the specimen surface structure is determined based on the variation of the vibration amplitude of cantilever. An independent claim is also included for scanning probe microscope.