发明名称 PHOTOSENSITIVE RESIN COMPOSITION
摘要 <p>Photosensitive resin composition contains an alkali-soluble acrylic resin, quinone-diazide group-containing photosensitizer and a solvent which is a mixture of propylene glycol monomethyl ether acetate (A) and a solvent whose vapor pressure under normal pressure is less than that of (A). The composition contains a phenolic compound. Photosensitive resin composition contains an alkali-soluble acrylic resin, quinone-diazide group-containing photosensitizer and a solvent which is a mixture of propylene glycol monomethyl ether acetate (A) and a solvent whose vapor pressure under normal pressure is less than that of (A). The composition contains a phenolic compound of formula (I). [Image] R1- R7H, 1-4C alkyl of a group of formula (Ia); m and n : 0-2; a, b, c, d, e, f and g : 0-5 where a + b = 5, c + d = 5, e + f = 5 and g + h = 5; i : 0-2.</p>
申请公布号 EP1482360(A1) 申请公布日期 2004.12.01
申请号 EP20030707016 申请日期 2003.02.24
申请人 CLARIANT INTERNATIONAL LTD. 发明人 TAKAHASHI, SHUICHI;KAWATO, SHUNJI
分类号 G03F7/004;G03F7/022;G03F7/023;G03F7/038;H01L21/027;(IPC1-7):G03F7/022 主分类号 G03F7/004
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