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发明名称
摘要
申请公布号
JP3286034(B2)
申请公布日期
2002.05.27
申请号
JP19930229213
申请日期
1993.09.14
申请人
发明人
分类号
H01L31/10;H01L31/107;H01L31/108;(IPC1-7):H01L31/10
主分类号
H01L31/10
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