发明名称 |
DAMPFPHASENABSCHEIDUNG VON ORGANISCHEN DÜNNEN SCHICHTEN BEI NIEDEREM DRUCK |
摘要 |
<p>Methods for preparing organic thin films on substrates, the method comprising the steps of providing a plurality of organic precursors in the vapor phase, and reacting the plurality or organic precursors at a sub-atmospheric pressure. Also included are thin films made by such a method and apparatuses used to conduct such a method. The method is well-suited to the formation of organic light emitting devices and other display-related technologies.</p> |
申请公布号 |
DE69827293(D1) |
申请公布日期 |
2004.12.02 |
申请号 |
DE1998627293 |
申请日期 |
1998.11.16 |
申请人 |
THE TRUSTEES OF PRINCETON UNIVERSITY, PRINCETON |
发明人 |
FORREST, R.;BURROWS, PAUL;BAN, S. |
分类号 |
H05B33/10;C23C16/00;C23C16/30;H01L51/00;H01L51/30;H01L51/40;H01L51/50;(IPC1-7):C23C16/00;H01J1/62;B65D35/12 |
主分类号 |
H05B33/10 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|