| 摘要 |
<p>The apparatus has an illumination optical system to illuminate a pattern on an object with light supplied from a semiconductor laser light source (1a). A projection optical system projects an image of the pattern onto a plate. A photosensor (4a) detects a positional offset of the pattern image. A mirror drive (6) inclines a mirror (M2), and moves the mirror by a minute amount in an optical-axis direction based on the offset. An independent claim is also included for a device fabrication method.</p> |
