METHOD FOR POLISHING WORKPIECE

摘要

PROBLEM TO BE SOLVED: To provide a wax-free polishing method for obtaining the same flatness as in a sticking method with water while obtaining the productivity exceeding the sticking method with water. SOLUTION: This method for polishing a workpiece 106 comprises a step of holding the workpiece 106 by vacuum suction via a nonlinear elastic member 104 which abuts on the workpiece 106 and conveying the workpiece 106 to a fixed position of a polishing apparatus and a step of holding the workpiece 106 with the nonlinear elastic member 104 and polishing the workpiece 106 by pressing it on a polishing member 107 of the polishing apparatus and sliding it relatively thereto. In this method, the polishing apparatus is operated in a condition of pressure of vacuum suction for holding the workpiece 106 lower than pressure for pressing the workpiece 106 to the polishing member 107.