发明名称 |
Perforated-transparent polishing pad |
摘要 |
The method forms a transparent polishing pad by first step forming a plurality of openings through a disk-shaped pad body. The plurality of openings is distributed about the disk-shaped pad body and a transparent window within a portion of the pad body and the transparent window. Then sealing the openings in the transparent window with a transparent material allows transport of polishing fluids through the openings in the disk-shaped pad body and prevents transport of the polishing fluids through the transparent window. |
申请公布号 |
US6824447(B2) |
申请公布日期 |
2004.11.30 |
申请号 |
US20020331012 |
申请日期 |
2002.12.27 |
申请人 |
RODEL NITTA CORPORATION |
发明人 |
TAKAHASHI SHOGO;SHIMIZU HAJIME |
分类号 |
B24B37/00;B24B37/04;B24B37/20;B24B37/22;B24B37/24;B24D13/14;H01L21/304;(IPC1-7):B24D49/12 |
主分类号 |
B24B37/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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