发明名称 Fluid dielectric variable capacitor
摘要 This invention relates to an apparatus and method of using a high frequency, high power, fluid dielectric variable capacitor for an impedance matching network. The apparatus consists of a bow-tie rotary vane, a set of two fixed vanes, and a set of rotating vanes adapted to rotate interdigitally between the fixed vanes. A dielectric fluid is circulated between the fixed vanes and the rotating vanes for cooling the device. This arrangement facilitates production of a device having a higher capacitance and a smaller size, thus making it suitable for use in a matching network.
申请公布号 US6825090(B2) 申请公布日期 2004.11.30
申请号 US20030611909 申请日期 2003.07.03
申请人 TOKYO ELECTRON LIMITED 发明人 JOHNSON WAYNE L.
分类号 G01R27/26;H01G5/00;H01G5/013;H01G7/00;H01L21/20;(IPC1-7):H01L21/20 主分类号 G01R27/26
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