发明名称 |
Dimensionally stable ion optic component and method of manufacturing |
摘要 |
An ion optic device is dimensionally stable over variations in temperature when constructed with a ceramic or glass-ceramic substrate. A conductive or resistive coating is applied on surfaces of the substrate that are required to be particularly conductive or resistive for the function of the ion optic device.
|
申请公布号 |
US6825474(B2) |
申请公布日期 |
2004.11.30 |
申请号 |
US20020072214 |
申请日期 |
2002.02.07 |
申请人 |
AGILENT TECHNOLOGIES, INC. |
发明人 |
YOUNG JAMES E. |
分类号 |
H01J9/14;H01J37/147;H01J49/42;(IPC1-7):H01J37/147 |
主分类号 |
H01J9/14 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|