发明名称 Dimensionally stable ion optic component and method of manufacturing
摘要 An ion optic device is dimensionally stable over variations in temperature when constructed with a ceramic or glass-ceramic substrate. A conductive or resistive coating is applied on surfaces of the substrate that are required to be particularly conductive or resistive for the function of the ion optic device.
申请公布号 US6825474(B2) 申请公布日期 2004.11.30
申请号 US20020072214 申请日期 2002.02.07
申请人 AGILENT TECHNOLOGIES, INC. 发明人 YOUNG JAMES E.
分类号 H01J9/14;H01J37/147;H01J49/42;(IPC1-7):H01J37/147 主分类号 H01J9/14
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